Scanning Electron Microscopy with Energy Dispersive X-ray Spectroscopy (SEM-EDX) is a technique for analyzing the elements present near the surface of a selected microscopic region of a sample. Using the SEM image to select the area of interest, an energy dispersive detector is used to measure the energies of backscattered x-rays which are characteristic of the elements present.
JEOL JSM 6510-LV Scanning Electron Microscope with MOXTEK 550i thin film coated IXRF energy dispersive spectrometer
Magnification: 5´ - 300,000´
Resolution: 4 nm